PBG filters – anisotropic etching

PBG filters – anisotropic etching

PBG filter modeled in AnisE

This previous post discussed the development of photonic band gap filters by researchers at SSN College of Engineering, Tamilnadu, India.  The researchers also virtually prototyped their device using AnisE, one of the anisotropic etch simulation tools in IntelliSuite.  AnisE allowed them to explore how different etch recipes and mask combinations would create the desired geometry for their structure.  Download the paper to see more details about the device fabrication and virtual prototyping.

SEM images of PBG structure (side view)

 

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