A HIGH-SENSITIVE ULTRA-THIN MEMS CAPACITIVE PRESSURE SENSOR

A schematic drawing

Y. Zhang, R. Howver, B. Gogoi* and N. Yazdi
Evigia Systems, Inc., Ann Arbor, Michigan, USA
*Currently with HVVi Semiconductors, Inc., Phoenix, Arizona, USA

ABSTRACT
This paper reports an ultra-thin MEMS capacitive pressure sensor with high pressure sensitivity of better than 150aF/Pa, and small die size of 1.0mm × 1.0mm × 60μm. It is able to detect ambient pressure change with a resolution of 0.025% in a pressure range +/-3.5KPa. This capacitive pressure sensor decouples the pressure sensing from its capacitance sensing by using a hermetically sealed capacitor that is electrically isolated but mechanically coupled with a pressure sensing diaphragm such that a large dynamic range and high pressure sensitivity can be readily achieved. Because the capacitor is hermetically sealed in a cavity, this capacitive pressure sensor is also immune to measurement media and EMI (Electromagnetic Interference) effects.

 

KEYWORDS
Capacitive pressure sensor, large dynamic range, high sensitivity, Ultra-thin, MEMS, immune to media, EMI resistance

 

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One Response to “A HIGH-SENSITIVE ULTRA-THIN MEMS CAPACITIVE PRESSURE SENSOR”

  1. Michael Melnychuk says:

    Hello,

    I am interested in this pressure sensor, do you have any additional information on it?

    Thanks,

    Mike