TEMPERATURE SENSING PROBE INTEGRATED WITH AN SU-8 FLEXIBLE RIBBON CABLE FOR HEART SURGERY APPLICATION

SEM photographs

Kuei-Shu Li1, Tzu-Yuan Chao1, Y. T. Cheng1, Jing-Kuang Chen2 and Yih-Sharng Chen3
1Department of Electronics Engineering, National Chiao Tung University, Hsinchu, Taiwan
2Department of Electrical and Computer Engineering, University of New Mexico, USA
3Department of Cardiovascular Surgery, National Taiwan University Hospital, Taipei, Taiwan

ABSTRACT
This paper presents a silicon probe designed with three polysilicon resistance temperature detectors (RTDs) for heart temperature sensing in open-heart surgery. Via an integrated SU-8/Cu flexible ribbon cable for signal transmission to the instrument reader outside human body, the probe with a 40° tip angle can provide ~0.9°C sensing accuracy and sustain a 4N buckling load large enough for the probe to easily penetrate pig’s myocardium. The device characteristics have shown the potential for clinical heart temperature sensing applications

KEYWORDS
Open-Heart Surgery, Polysilicon Resistance Temperature Detectors, Silicon Probe

 

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