K. Fujii1, T. Toyonaga1,2, T. Fujita1,2, Y. G. Jiang2, K. Higuchi2 and K. Maenaka1,2
1University of Hyogo, Himeji, Hyogo, Japan
2JST ERATO Maenaka Human-Sensing Fusion Project, Himeji, Hyogo, Japan
ABSTRACT
In this study, an electret based energy harvester with a single silicon structure...