Use FabSim to quickly create photo-realistic process models and cross sections using full physical simulation.

FabSim is a visualizer that enables you to view and debug your complex process flow before setting foot in the cleanroom. FabSim works with IntelliFab to render each process step in vivid detail. Users can view their structure at each process step and view cross sections at any angle for easier debugging.

IntelliSense has long been the MEMS industry leader in physical process simulation with tools like RECIPE for DRIE etch simulation, IntelliEtch for wet etch simulation, and Exposure for lithographic process simulation. All of this functionality is integrated into IntelliSuite¡¯s flagship process simulator, FabSim. The new simulator makes it easy to create photo-realistic process models using full physical simulation, rather than traditional geometrical methods.

 

How is FabSim different from FabViewer?

FabSim and FabViewer have a very similar look and feel. FabSim can perform all of the same functions including deposition, UV lithography, etching, bonding, and so on. It even supports the same useful PowerPoint export ability. The main difference is in the solving method. FabViewer uses basic voxel-based geometry while FabSim uses physical solving methods, yielding more accurate results. The difference is most noticeable when dealing with Si wet anisotropic etch steps. The image below shows an example of wet etching using both tools.

What model or method does FabSim use for DRIE and wet
anisotropic Etch?

For both etch types, FabSim uses a CA model for more accuracy and reduced simulation time.

 

What model or method does FabSim use for SU8 lithography process
steps?

The SU8 lithography module uses a 3D dynamic CA model. The simulation speed is greatly improved compared with a static 3D CA model.